Effects of environmental temperature on the performance of a micromachined gyroscope

This paper presents the modeling of the detection capacitance analysis for a tuning fork vibratory microgyroscope fabricated by the bulk silicon micromachining technology. The dynamic characteristics of the detection capacitance of the microgyroscope are calculated based on the model. Then the effects of environmental thermal fluctuations on the microgyroscope are considered. Non-linear analysis and numerical simulations show that the frequencies and output of the microgyroscope have slight deviations when the microgyroscope works at different environmental temperature. The deviations of the frequencies and dynamic characteristics are calculated accurately, which provides a reference for the design of temperature compensation method and robust structural design for the microgyroscope.