☆ 4.8 Article

Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials

ADVANCED MATERIALS (2013)

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Journal

ADVANCED MATERIALS
Volume 25, Issue 44, Pages 6430-6435

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201302087

Keywords

vanadium dioxide; adaptative electronics; frequency tuning; Joule heating; mechanical resonators

Categories

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

Funding

  1. FIRB RBAP115AYN
  2. Fondazione CARIGE [PRIN 2010NR4MXA]
  3. Japan Society for promotion of Science (JSPS) [25286058]
  4. Ministry of Education, Culture, Sports, Science, and Technology (MEXT) [21676001]
  5. Grants-in-Aid for Scientific Research [21676001, 25286058] Funding Source: KAKEN

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