Journal
ADVANCED MATERIALS
Volume 25, Issue 26, Pages 3588-3592Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201300896
Keywords
nanophotonics; photonic crystals; lithography; atomic layer deposition; titanium dioxide
Categories
Funding
- Deutsche Forschungsgemeinschaft (DFG)
- State of Baden-Wurttemberg
- Karlsruhe Institute of Technology (KIT) through the DFG-Center for Functional Nanostructures (CFN)
- Carl-Zeiss-Foundation