Journal
ADVANCED MATERIALS
Volume 24, Issue 12, Pages 1610-1615Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201104697
Keywords
epitaxial heterostructures; ferroelectrics; hard mask; dielectric materials; PbZr0; 2Ti0; 8O3
Categories
Funding
- Office of Naval Research [N00014-10-10525]
- Army Research Office [W911NF-10-1-0482]
- U.S. Department of Energy [DE-FG02-07ER46453, DE-FG02-07ER46471]