4.8 Article

Epitaxial Ferroelectric Heterostructures Fabricated by Selective Area Epitaxy of SrRuO3 Using an MgO Mask

Journal

ADVANCED MATERIALS
Volume 24, Issue 12, Pages 1610-1615

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201104697

Keywords

epitaxial heterostructures; ferroelectrics; hard mask; dielectric materials; PbZr0; 2Ti0; 8O3

Funding

  1. Office of Naval Research [N00014-10-10525]
  2. Army Research Office [W911NF-10-1-0482]
  3. U.S. Department of Energy [DE-FG02-07ER46453, DE-FG02-07ER46471]

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