Journal
ADVANCED MATERIALS
Volume 25, Issue 1, Pages 91-95Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201202549
Keywords
self-organization; nanocrystalline metal; 3D assembly; reactive ion etching; focused ion beam
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Funding
- Thailand Commission on Higher Education, NGSMP of Finland
- Academy of Finland [135135, 141559]
- Academy of Finland (AKA) [135135, 141559, 141559, 135135] Funding Source: Academy of Finland (AKA)
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Ion processing of the reactive surface of a free-standing polycrystalline metal film induces a flow of atoms into grain boundaries, resulting in plastic deformation. A thorough experimental and theoretical analysis of this process is presented, along with the demonstration of novel engineering concepts for precisely controlled 3D assembly at micro- and nanoscopic scales.
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