4.8 Article

Nanotransfer Printing with sub-10 nm Resolution Realized using Directed Self-Assembly

Journal

ADVANCED MATERIALS
Volume 24, Issue 26, Pages 3526-3531

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201200356

Keywords

nanotransfer printing; soft lithography; block copolymers; self-assembly; polydimethylsiloxane

Funding

  1. Green Smart Card Platform Technologies Based on 3D Printed Electronic Devices Project [B551179-09-07]
  2. Fundamental R&D Programs for Core Technology of Materials [10040038]
  3. MKE (Ministry of Knowledge Economy)
  4. ISTK (Korea Research Council for Industrial Science and Technology)
  5. Smart IT Convergence System Research Center
  6. MEST as Global Frontier Research Project of Republic of Korea [SIRC-2011-0031852]

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