Plasma-Enabled Graded Nanotube Biosensing Arrays on a Si Nanodevice Platform: Catalyst-Free Integration and In Situ Detection of Nucleation Events

Low-temperature plasmas in direct contact with arbitrary, written linear features on a Si wafer enable catalyst-free integration of carbon nanotubes into a Si-based nanodevice platform and in situ resolution of individual nucleation events. The graded nanotube arrays show reliable, reproducible, and competitive performance in electron field emission and biosensing nanodevices.