☆ 4.8 Article

Air-Bridged Ohmic Contact on Vertically Aligned Si Nanowire Arrays: Application to Molecule Sensors

ADVANCED MATERIALS (2012)

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Journal

ADVANCED MATERIALS
Volume 24, Issue 17, Pages 2284-2288

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201200347

Keywords

air-bridged ohmic contact; vertically aligned nanowires; nanowire-based devices; supercritical point dry; metal-assisted chemical etching

Categories

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

Funding

  1. National Research Foundation of Korea (NRF)
  2. Ministry of Education, Science and Technology [20110030200]

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