Journal
ADVANCED MATERIALS
Volume 23, Issue 13, Pages 1567-1571Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201004095
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Funding
- US National Science Foundation
- Singapore-MIT Alliance
- ILJU foundation
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Templated formation of complex patterns via solid-state dewetting is demonstrated. Thin films often dewet from their substrates when they are heated, even while remaining in the solid state throughout the process. It is shown that solid-state dewetting of epitaxial films can be templated through lithographic pre-patterning, so as to reproducibly form complex structures with sub lithographic feature sizes.
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