4.8 Article

Nanosphere Lithography for the Fabrication of Ultranarrow Graphene Nanoribbons and On- Chip Bandgap Tuning of Graphene

Journal

ADVANCED MATERIALS
Volume 23, Issue 10, Pages 1246-+

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201003847

Keywords

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Funding

  1. NSF [50702074, 20973195]
  2. MOST of China [2009DFA01290, 2007CB936203, 2007AA03Z353]

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An innovative approach for the high-throughput, rapid, and low-cost fabrication of ultranarrow graphene nanoribbons (GNRs) using nanosphere lithography (NSL) nanopatterning in combination with low-power O-2 plasma etching is presented. The intrinsic simplicity of NSL patterning enables this fabrication approach to be applicable for the straightforward on-chip fabrication of GNRs and bandgap tuning of graphene.

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