Journal
ADVANCED MATERIALS
Volume 23, Issue 7, Pages 860-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201003885
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Funding
- Center for Nanoscale Mechatronics Manufacturing
- Ministry of Education, Science and Technology, KOREA
- Low Observable Technology Research Center of the Defense Acquisition Program Administration and Agency for Defense Developmen
- National Research Foundation of Korea [2008-2006612] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Defect-free and dense micropillar arrays with a high aspect ratio are replicated from etched Si masters using high-modulus polyurethane acrylate. The newly designed conformable solid-index mask can generate high-resolution 3D nanostructures that can be patterned through proximity field nanopatterning (PnP) in a single exposure step. The superb optical property proves the quality of 3D nanostructures.
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