4.8 Article

Tungsten Oxide as a Gate Dielectric for Highly Transparent and Temperature-Stable Zinc-Oxide-Based Thin-Film Transistors

Journal

ADVANCED MATERIALS
Volume 23, Issue 45, Pages 5383-+

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201103087

Keywords

transistors; dielectrics; zinc oxide

Funding

  1. Deutsche Forschungsgemeinschaft [Sonderforschungsbereich 762]
  2. Leipzig School of Natural Sciences [G5185]

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Tungsten oxide is currently used as gate insulator in pH-sensing ion-sensitive field-effect transistors (ISFETs) and in electrochromic devices. Its great potential as a high-kappa dielectric with high transparency and temperature stability is reported. Owing to the low gate voltage sweep necessary to turn the transistor on and off, a possible application could be as a low-voltage pixel driver in active-matrix displays in harsh environments.

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