Journal
ADVANCED MATERIALS
Volume 23, Issue 28, Pages 3176-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201100717
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Funding
- Basic Science Research Program [2010-0003973]
- Ministry of Education Science [2010-0019185]
- Korea Research Council Industrial Science and Technology of Korea [B551179-10-01-00]
- NSF STTR through Appliflex LLC [0930594]
- World Class University through the National Research Foundation, Ministry of Education, Science and Technology of Korea. [R32-2009-000-10130-0]
- Ministry of Education, Science & Technology (MoST), Republic of Korea [N10110044] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Council of Science & Technology (NST), Republic of Korea [B551179-10-01-00] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2005-2002435, 과C6A1611, 2010-0003973] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- Div Of Industrial Innovation & Partnersh
- Directorate For Engineering [0930594] Funding Source: National Science Foundation
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A digital, direct nanoscale metal patterning method is developed using femtosecond laser digital processing of metal nanoparticles for nanoscale electronics fabrication without using conventional vacuum deposition or a photolithography mask. This method is expected to be a potential alternative to the conventional electron beam lithography method for arbitrary nanoscale direct patterning in single-step, low-temperature, and non-vacuum environments.
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