Conformal Transparent Conducting Oxides on Black Silicon

Black silicon with aspect ratios up to 10 and an average optical reflectance of only 2.5% over the whole absorbing spectral range is covered perfectly conformal with a transparent conductive oxide. The thin film is deposited by thermal atomic layer deposition (ALD) and exhibits a resistivity of 1.1 Omega cm. This concept promises a new design for an efficient heterojunction silicon solar cell.