Journal
ADVANCED MATERIALS
Volume 22, Issue 47, Pages 5393-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201003074
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Funding
- Ministry of Education, Culture, Sports, Science, and Technology [21760267]
- Grants-in-Aid for Scientific Research [21760267] Funding Source: KAKEN
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Single-crystal diamond nanowires with well-controlled dimensions are fabricated in batches for nanoelectromechanical systems (NEMS). All-single-crystal diamond NEM switches are demonstrated using these nanowires with high reproducibility, high controllability, repeated switching, and no stiction. Diamond switches not only overcome the stiction and abrasion problems in existing electromechanical switches, but also circumvent the shallow doping problem.
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