Journal
ADVANCED MATERIALS
Volume 22, Issue 29, Pages 3171-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200904153
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Funding
- Sandia National Laboratories
- United Stated Department of Energy's National Nuclear Security Administration [DE-AC04-94AL85000]
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A new fabrication approach, self-aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 mu m. The composite resonators are oriented on the interior face of approximately-spheroidal cavities, and hence represent the first instance of fabrication of micrometer-scale SRRs with out-of-plane current flow.
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