4.8 Article

Scanning Probe Direct-Write of Germanium Nanostructures

Journal

ADVANCED MATERIALS
Volume 22, Issue 41, Pages 4639-4642

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201001987

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Funding

  1. University of Washington
  2. University of Washington Center for Nanotechnology
  3. NSF- IGERT [DGE-050457]
  4. Office of Science, Office of Basic Energy Sciences, of the U. S. Department of Energy [DE-AC02-05CH11231]
  5. Department of Energy's Office of Biological and Environmental Research and located at Pacific Northwest National Laboratory

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Atomic force microscope direct-write of carbon-free germanium nanostructures is easily accomplished via high-field reaction of liquid diphenylgermane precursor. Sub-30 nm features are written in arbitrary patterns at velocities as high as 100 mu m s(-1).

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