4.8 Article

Graphene Shape Control by Multistage Cutting and Transfer

Journal

ADVANCED MATERIALS
Volume 21, Issue 44, Pages 4487-+

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200900942

Keywords

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Funding

  1. Interconnect Focus Center
  2. Focus Center Research Program, a Semiconductor Research Corporation program
  3. CONACYT-Mexico [56787]
  4. Inter American Collaboration [58899]

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Cutting graphene by a catalytic hydrogenation process can generate graphene pieces with smooth edges of atomic precision and well-defined shapes. Controlled cutting of graphene by creating graphene step edges by oxidation or plasma etching is demonstrated. A combination of cutting, transfer, and lithography is shown to allow the fabrication of isolated graphene devices with specific edge and shape control.

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