Journal
ADVANCED MATERIALS
Volume 21, Issue 2, Pages 193-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200801959
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Funding
- US Department of Energy (DOE)
- DOE EE-RE Solid State Lighting Program
- NSF/DMR Ceramic Program [NSF 0709831]
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Epitaxial metal nitride films are prepared using a general chemical solution approach. A polymer-assisted deposition to prepare epitaxial cubic TiN, metastable AlN, and ternary nitride Ti1-xAlxN films is demonstrated. The structural, optical and electrical properties of the films are investigated, and may be of interest for many technological applications.
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