Journal
ADVANCED MATERIALS
Volume 21, Issue 29, Pages 2983-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200900269
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Funding
- Les Schowalter and Glenn Elaschuk in the Nanofabrication facility (University of Alberta)
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Arrays of silicon nanotubes; (SiNTs) with controllable architectures, wall thicknesses and crystallinity are fabricated by a new template-assisted technique. The method includes a sequence of glancing angle deposition of the templates, low-pressure CVD shell-Si coating, ion-milling to expose the templates, and wet-chemical etching for template removal. The technique may be generally adapted to a wide variety of morphologies and NT materials.
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