Journal
ADVANCED MATERIALS
Volume 21, Issue 48, Pages 4932-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200901561
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Funding
- European Project SAXIER [011934]
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Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films, Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process.
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