Fabrication of Three-Dimensional Photonic Crystals Using Multibeam Interference Lithography and Electrodeposition

High-quality 3D photonic crystals are fabricated through electrode position into a polymer template created by multibeam interference lithography. Complete infilling of the template is achieved through electrodeposition of Cu2O, and subsequent etching of the template results in a Cu2O/air photonic crystal with the exact inverse structure of the template (see figure). The resultant photonic crystal shows a high peak reflectance at the theoretically predicted wavelength.