Journal
ADVANCED MATERIALS
Volume 21, Issue 40, Pages 4050-+Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200803243
Keywords
-
Categories
Funding
- Information Display RD Center grant [F0004091]
- Ministry of Knowledge Economy, Republic of Korea
- KIEST [2008-10002-0067-0]
- kisT [2E20900]
Ask authors/readers for more resources
A new and cost-effective replica fabrication method for transparent and hard molds used in imprinting lithography is presented. The process uses a polymer copy as a carrier. Replicated hard molds eliminate the need for direct contact between the master and the patterned polymer on the substrate, and thus reduce contamination of the master.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available