Surface Morphological Properties of Mo-Based Thin Films on Glass

In that report we observe the initial stages in the process of film growth at different irradiation doses. Investigations of influence of Mo deposition on glass substrates by means of self-ion-assisted deposition on its topography (atomic force microscopy) and wettability (sessile-drop method) were carried out. It was found out that with an increase of the irradiation dose, the average roughness and the contact angle increases rapidly at first and then decrease. 2.45-2.77 increase in the contact angle of water when Mo-based coating was deposited on the glass was observed.