Journal
ACTA MATERIALIA
Volume 73, Issue -, Pages 48-55Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.actamat.2014.03.067
Keywords
Phase-change material; Nanoscale; Ti-Sb-Te; Mass transport
Funding
- National Key Basic Research Program of China [2011CBA00607, 2013CBA01902, 2010CB934300]
- Strategic Priority Research Program of the Chinese Academy of Sciences [XDA09020402]
- National Integrated Circuit Research Program of China [2009ZX02023-003]
- Science and Technology Council of Shanghai [11DZ2261000]
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Investigation of atomic migration behavior in nanoscale phase-change material is very valuable for phase-change memory applications. In this work, Ti0.5Sb2Te3-based phase-change nanobridges were fabricated and mass transport by atomic migration was studied. A 3-D finite-element simulation on the electrothermal field was introduced to describe the electrothermal environment in the phase-change region. During the nanosecond operation, an obvious compositional distribution resulting from atomic migration was observed in the Ti0.5Sb2Te3 phase-change nanobridge. Based on the mass continuity equation, a physical model for mass transport is proposed to illustrate that the density variation during the amorphous-to-crystalline structural transformation is the main reason for the atomic migration in nanoscale Ti0.5Sb2Te3 phase-change material. (C) 2014 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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