Enhanced Performance of ZnO Piezotronic Pressure Sensor through Electron-Tunneling Modulation of MgO Nano layer

Piezoelectric materials can be applied into electromechanical conversion and attract extensive attention with potential applications in various sensors. Here, we present two types of piezotronic pressure sensors based on ZnO nanoarrays. By introducing an insulating MgO (i-MgO) nanolayer, the on/off current ratio of the sensor is significantly improved up to 10 (5). Furthermore, the sensor shows a high sensitivity of 7.1 x 10 (4) gf(-1), a fast response time of 128 ms. The excellent properties are attributed to the combination of piezoelectric effect of ZnO nanoarrays and electron-tunneling modulation of MgO nanolayer, and the reversible potential barrier height controlled by piezoelectric potential. We further investigate the service behavior of the sensor, which can detect force varying from 3.2 to 27.2 gf. Our research provides a promising approach to boost the performance of nanodevices.