4.8 Article

Controlled Growth of High-Quality Monolayer WS2 Layers on Sapphire and Imaging Its Grain Boundary

Journal

ACS NANO
Volume 7, Issue 10, Pages 8963-8971

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/nn403454e

Keywords

transition metal dichalcogenide; monolayer; domain boundary; thickness control; characterization

Funding

  1. National Natural Science Foundation of China [51222201, 51290272, 21073003, 21201012, 51121091, 51072004]
  2. Ministry of Science and Technology of China [2011CB921903, 2012CB921404, 2012CB933404, 2013CB932603, 2011CB933003]
  3. US. Department of Energy, Office of Basic Energy Sciences, Materials Sciences and Engineering Division [DE-AC02-76SF00515]

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Atomically thin tungsten disulfide (WS2), a structural analogue to MoS2, has attracted great Interest due to its indirect-to-direct band-gap tunability, giant spin splitting, and valley-related physics. However, the batch production of layered WS2 is underdeveloped (as compared with that of MoS2) for exploring these fundamental Issues and developing its applications. Here, using a low-pressure chemical vapor deposition method, we demonstrate that high-crystalline mono- and few-layer WS2 flakes and even complete layers can be synthesized on sapphire with the domain size exceeding 50 x 50 mu m(2). Intriguingly, we show that, with adding minor H-2 carrier gas, the shape of monolayer WS2 flakes can be tailored from jagged to straight edge triangles and still single crystalline. Meanwhile, some intersecting triangle shape flakes are concomitantly evolved from more than one nucleus to show a polycrystalline nature. It is interesting to see that, only through a mild sample oxidation process, the grain boundaries are easily recognizable by scanning electron microscopy due to its altered contrasts. Hereby, controlling the initial nucleation state is crucial for synthesizing large-scale single-crystalline flakes. We believe that this work would benefit the controlled growth of high-quality transition metal dichalcogenide, as well as in their future applications in nanoelectronics, optoelectronics, and solar energy conversions.

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