Journal
ACS NANO
Volume 7, Issue 7, Pages 6086-6091Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nn4018872
Keywords
two-dimensional (2D) crystals; molybdenum disulfide (MoS2); nanoelectromechanical systems (NEMS); resonators; thermomechanical noise; frequency scaling; displacement sensitivity
Categories
Funding
- Case School of Engineering
- National Science Foundation [DMR-0907477]
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [0907477] Funding Source: National Science Foundation
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Molybdenum disulfide (MoS2), a layered semiconducting material in transition metal dichalcogenides (TMDCs), as thin as a monolayer (consisting of a hexagonal plane of Mo atoms covalently bonded and sandwiched between two planes of S atoms, in a trigonal prismatic structure), has demonstrated unique properties and strong promises for emerging two-dimensional (2D) nanodevices. Here we report on the demonstration of movable and vibrating MoS2 nanodevices, where MoS2 diaphragms as thin as 6 nm (a stack of 9 monolayers) exhibit fundamental-mode nanomechanical resonances up to f(0) similar to 60 MHz in the very high frequency (VHF) band, and frequency-quality (Q) factor products up to f(0) x Q similar to 2 x 10(10)Hz, all at room temperature. The experimental results from many devices with a wide range of thicknesses and lateral sizes, in combination with theoretical analysis, quantitatively elucidate the elastic transition regimes in these ultrathin MoS2 nanomechanical resonators. We further delineate a roadmap for scaling MoS2 2D resonators and transducers toward microwave frequencies. This study also opens up possibilities for new classes of vibratory devices to exploit strain- and dynamics-engineered ultrathin semiconducting 20 crystals.
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