Journal
ACS NANO
Volume 5, Issue 6, Pages 4843-4849Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nn2009112
Keywords
nanoparticle arrays; nanosphere lithography; LIFT; optical sensing
Categories
Funding
- Deutsche Forschungsgemeinschaft (DFG) [SPP1391, SFB-569]
- Centre of Excellence for Quantum Engineering and Space-Time Research (QUEST)
- [CH179/20-1]
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A novel method for high-speed fabrication of large scale periodic arrays of nanoparticles (diameters 40-200 nm) is developed. This method is based on a combination of nanosphere lithography and laser-induced transfer. Fabricated spherical nanoparticles are partially embedded into a polymer substrate. They are arranged into a hexagonal array and can be used for sensing applications. An optical sensor with the sensitivity of 365 nm/RIU and the figure of merit of 21.5 in the visible spectral range is demonstrated.
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