4.8 Article

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates

Journal

ACS NANO
Volume 5, Issue 6, Pages 4600-4606

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/nn2003234

Keywords

atomic layer deposition; sequential infiltration; block copolymer; nano; silicon dioxide

Funding

  1. U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-06CH11357, DE-SC0001785]

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Sequential infiltration synthesis (MS), combining stepwise molecular assembly reactions with self-assembled block copolymer (BCP) substrates, provides a new strategy to pattern nanoscopic materials in a controllable way. The selective reaction of a metal precursor with one of the pristine BCP domains Is the key step in the SIS process. Here we present a straightforward strategy to selectively modify self-assembled polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) BCP thin films to enable the SIS of a variety of materials including SiO2, ZnO, and W. The selective and controlled interaction of trimethyl aluminum with carbonyl groups in the PMMA polymer domains generates Al-CH3/Al-OH sites inside the BCP scaffold which can seed the subsequent growth of a diverse range of materials without requiring complex block copolymer design and synthesis.

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