Journal
ACS NANO
Volume 3, Issue 12, Pages 4033-4042Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nn901174e
Keywords
nanofabrication; metal-assisted chemical etching; silicon; etching; 3D nanostructures
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Funding
- National Science Foundation [0800849]
- Directorate For Engineering
- Div Of Civil, Mechanical, & Manufact Inn [0800849] Funding Source: National Science Foundation
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Metal-assisted chemical etching (MaCE) of silicon in conjunction with shaped catalysts was used to fabricate 3D nanostructures such as sloping channels, cycloids, and spirals along with traditional vertical channels. The investigation used silver nanorods, nanodonuts along with electron beam lithography (EBL)-patterned gold nanodiscs, nanolines, squares, grids, and star-shaped catalysts to show how catalyst shape and line width directly influence etching direction. Feature sizes ranging from micrometers down to 25 nm were achieved with aspect ratios of at least 10:1 and wall roughness of 10 nm or less. This research demonstrates the potential of MaCE as a new, maskless nanofabrication technology.
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