Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 6, Issue 22, Pages 19574-19578Publisher
AMER CHEMICAL SOC
DOI: 10.1021/am503698h
Keywords
CVD; graphene; growth; cooling rate; grain
Funding
- Technology Innovation Program - Korea Government Ministry of Knowledge Economy [10044410]
- Nano-Convergence Foundation by Ministry of Science, ICT and Future Planning (MSIP, Korea)
- Ministry of Trade, Industry and Energy (MOTIE, Korea)
- Basic Science Research Program through National Research Foundation of Korea (NRF) by Ministry of Education, Science and Technology [NRF-2013R1A2A2A01010027]
- Energy Efficiency & Resources of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) by Korea Government Ministry of Knowledge Economy [20122010100130]
- Korea Institute of Science and Technology (KIST)
- Basic Science Research Program through National Research Foundation of Korea (NRF) - Ministry of Education [2010-0020207]
- Nano-Material Technology Development Program through National Research Foundation of Korea (NRF) by the Ministry of Science, ICT and Future Planning [2012M3A7B4049888]
- TJ Park Science Fellowship of POSCO TJ Park Foundation
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Here, we show that chemical vapor deposition growth of graphene on copper foil is strongly affected by the cooling conditions. Variation of cooling conditions such as cooling rate and hydrocarbon concentration in the cooling step has yielded graphene islands with different sizes, density of nuclei, and growth rates. The nucleation site density on Cu substrate is greatly reduced when the fast cooling condition was applied, while continuing methane flow during the cooling step also influences the nucleation and growth rate. Raman spectra indicate that the graphene synthesized under fast cooling condition and methane flow on cool-down exhibit superior quality of graphene. Further studies suggest that careful control of the cooling rate and CH4 gas flow on the cooling step yield a high quality of graphene.
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