Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 4, Issue 5, Pages 2680-2685Publisher
AMER CHEMICAL SOC
DOI: 10.1021/am300334p
Keywords
silicon; liquid silane; laser crystallization; plasma annealing
Funding
- Department of Energy [DE-FG36-08GO88160]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [0923354] Funding Source: National Science Foundation
Ask authors/readers for more resources
We report a solution process for the synthesis of crystalline silicon from the liquid silane precursor cyclohexasilane (Si6H12). Polysilane films were crystallized through thermal and laser annealing, with plasma hydrogenation at atmospheric pressure generating further structural changes in the films. The evolution from amorphous to microcrystalline is characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy and impedance spectroscopy. A four-decade enhancement in the electrical conductivity is attributed to a disorder order transition in a bonded Si network. Our results demonstrate a potentially attractive approach that employs a solution process coupled with ambient postprocessing to produce crystalline silicon thin films.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available