Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 3, Issue 2, Pages 245-251Publisher
AMER CHEMICAL SOC
DOI: 10.1021/am100901m
Keywords
sol-gel films; hybrid materials; lithography; fullerenes; acene
Funding
- CSIRO OCE
- Australian Research Council (ARC) [DP0988106]
- International Synchrotron Access Program (ISAP)
- Australian Research Council [DP0988106] Funding Source: Australian Research Council
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A phenyl-based hybrid organic - inorganic coating has been synthesized and processed by hard X-ray lithography. The overall lithography process is performed in a two-step process only (X-rays exposure and chemical etching). The patterns present high aspect: ratio, sharp edges, and high homogeneity. The coating has been doped with a variety of polycyclic aromatic hydrocarbon functional molecules, such as anthracene, pentacene, and fullerene. For the first time, hard X-rays have been combined with thick hybrid functional coatings, using the sol-gel thick film directly as resist. A new technique based on a new material combined with hard X-rays is now available to fabricate optical devices. The effect due to the high-energy photon exposure has been investigated using FT-IR and Raman spectroscopy, laser scanner, optical profilometer, and confocal and electron microscope. High-quality thick hybrid fullerene-dopea microstructures have been fabricated.
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