Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 3, Issue 11, Pages 4174-4179Publisher
AMER CHEMICAL SOC
DOI: 10.1021/am2010338
Keywords
nanoimprint lithography; P-SPEL; PMMA; metal nanowires; large-scale mold; gas sensor
Funding
- National Basic Research Program [2007CB808003, 2009CB939701]
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In this paper, a simple method is demonstrated for fabricating periodic metal nanowires based on the unconventional nanoimprint lithography (NIL) technique. Using this method, sub-100 nm metal nanowires with the rectangular cross-section are fabricated with microscale stamp. Furthermore, the metal nanowires with different widths and heights can be generated by adjusting the imprinting parameters with the same stamp. The metal nanowires prepared with this method can be used for chemical sensing, such as ammonia sensing, and it may have applications in optical signal processing.
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