Numerical and experimental analysis of the parameters of an electroacoustic thin-film microwave resonator

The results of numerical and experimental analysis of the parameters of a single-frequency microwave thin-film electroacoustic resonator based on an (0001)AlN piezofilm with an acoustic reflector operating at a frequency of 10 GHz are presented. The effect of the reflector design on the resonator characteristics is considered. Using the modified Butterworth-Van Dyke model, it was shown that the ohmic resistance of electrodes and entrance paths substantially decreases the Q-factor at the resonance frequency of series and the acoustic losses in the resonator deteriorate the Q-factor at the parallel resonance frequency.