Journal
21ST INTERNATIONAL CONFERENCE ON OPTICAL FIBER SENSORS
Volume 7753, Issue -, Pages -Publisher
SPIE-INT SOC OPTICAL ENGINEERING
DOI: 10.1117/12.884922
Keywords
Accelerometer; Fabry-Perot Interferometer; Laser micromachining
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A novel fiber-optic tip accelerometer based on Fabry-Perot (F-P) interferometer is proposed and demonstrated, with potential to operate under high temperature, in this paper. Such a tip accelerometer is directed fabricated on a large cladding fiber end by using the 157nm laser-micromachining technology. With the calibration of a micro electro mechanical systems (MEMS) accelerometer, the sensitivity of such a fiber-optic F-P accelerometer is 1.764 rad/g. The minimum detective acceleration is estimated to be 20 mu g.
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