Molecular Layer Deposition for Energy Conversion and Storage

The development of nanoscale coatings with well-controlled properties is critical to the future of nanotechnology for energy applications. As an extension of atomic layer deposition (ALD), molecular layer deposition (MLD), has recently emerged as a thin-film coating technique that can enable the development of high-performance materials in energy-related applications. MLD fabrication can be classified into two categories: polymer-based organics and inorganic-organic hybrid materials. The unique properties of low growth temperature, precise control of film thickness, uniformity, flexibility, and low density make MLD films very promising for energy-related applications. In this Review, we focus on the recent developments and understanding of MLD in the application of batteries, supercapacitors, water splitting, photodegradation, solar cells, and membranes. The different types of MLD films and nanomaterials derived from MLD are discussed based on the specific application and properties. Finally, the future direction of MLD in energy-related applications has been further investigated.