Realization and modeling of multilayer antireflection coatings for solar cells application

The antireflection coating deposition on the solar cell front faces can significantly reduce the optical losses. Unfortunately, these layers are not enough. For this, an application of an antireflection multilayer combining different materials is proposed as solution to reduce optical loss. In this study, an antireflection multilayer (single, 4 and 6 antireflection layers) have been modeled and realized. These multilayers based of silicon nitride and silicon oxynitride, were deposited by plasma enhanced chemical vapor deposition (PECVD, 13.56 MHz). The different results obtained over textured surfaces, exhibit that the best reflectivity value was 1.05% for the multilayer of 6 layers, compared to the 4 layers that was 3.26%.