3.8 Proceedings Paper

Position measurement in standing wave interferometer for metrology of length

Journal

PHOTONICS, DEVICES, AND SYSTEMS V
Volume 8306, Issue -, Pages -

Publisher

SPIE-INT SOC OPTICAL ENGINEERING
DOI: 10.1117/12.913615

Keywords

refractometry; nanopositioning; interferometry; nanometrology

Funding

  1. Agency of the Czech Republic, project [GA102/09/1276, GAP102/11/P820]
  2. Academy of Sciences of the Czech Republic [KAN311610701]
  3. Ministry of Education, Youth and Sports of the Czech Republic, project [LC06007, AV0 Z20650511]

Ask authors/readers for more resources

We present techniques oriented to improvement of precision in incremental interferometric measurements of displacements over a limited displacement range. The wavelength of the coherent laser source is here directly stabilized to a mechanical reference and not to a reference of any optical frequency. This may represent a reduction of uncertainty linking the laser wavelength not to indirectly evaluated refractive index but to the setup mechanics which cannot be completely eliminated. Here we suggest an approach where the traditional interferometers are replaced by a passive Fabry-Perot cavity with position sensing using an intracavity transparent photodetector.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

3.8
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available