Journal
NANOMATERIALS
Volume 8, Issue 1, Pages -Publisher
MDPI AG
DOI: 10.3390/nano8010032
Keywords
directed self-assembly; lamellar diblock copolymer; polyhedral oligomeric silsesquioxane (POSS); nanoimprint lithography; pattern transfer
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Funding
- EU FP7 NMP project
- Science Foundation Ireland [09/IN.1/602]
- EU LAMAND project [245565]
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The self-assembly of a lamellar-forming polystyrene-block-poly(dimethylsiloxane) (PS-b-PDMS) diblock copolymer (DBCP) was studied herein for surface nanopatterning. The DBCP was synthesized by sequential living anionic polymerization of styrene and hexamethylcyclotrisiloxane (D-3). The number average molecular weight (M-n), polydispersity index (M-w/M-n) and PS volume fraction (phi(ps)) of the DBCP were M-n(PS) = 23.0 kg mol(-1), M-n(PDMS) = 15.0 kg mol(-1), M-w/M-n = 1.06 and phi(ps) = 0.6. Thin films of the DBCP were cast and solvent annealed on topographically patterned polyhedral oligomeric silsesquioxane (POSS) substrates. The lamellae repeat distance or pitch (lambda(L)) and the width of the PDMS features (d(L)) are similar to 35 nm and similar to 17 nm, respectively, as determined by SEM. The chemistry of the POSS substrates was tuned, and the effects on the self-assembly of the DBCP noted. The PDMS nanopatterns were used as etching mask in order to transfer the DBCP pattern to underlying silicon substrate by a complex plasma etch process yielding sub-15 nm silicon features.
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