Journal
GREEN POWER, MATERIALS AND MANUFACTURING TECHNOLOGY AND APPLICATIONS, PTS 1 AND 2
Volume 84-85, Issue -, Pages 431-435Publisher
TRANS TECH PUBLICATIONS LTD
DOI: 10.4028/www.scientific.net/AMM.84-85.431
Keywords
ITO film; annealing effect; electrical and optical properties; sol-gel process
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Indium tin oxide thin film (ITO film) has been deposited onto the quartz glass by a sot-gel process, followed by annealing in air. The temperature range from 200 to 800 degrees C and the annealing effect on the optical, electrical and structural properties of ITO films has been studied in detail. ITO Films with a thickness of 100nm had an optical transparency up to 90% in the wavelength range of visible spectrum. The ITO film showed minimum resistivity of 1.65x10-3 Omega.cm-1 when annealing temperature was 600 degrees C in air. The rapid annealing process may contribute to the electrical property of ITO film for the densification of the micro structure. But the process may lead to the decrease of transparency for the reflection caused by grain boundary.
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