Journal
MICROMACHINES
Volume 9, Issue 7, Pages -Publisher
MDPI
DOI: 10.3390/mi9070332
Keywords
plasma electrolytic oxidation; micro arc oxidation; DC PEO; titanium; zinc nitrate hexahydrate Zn(NO3)(2)center dot 6H(2)O; magnesium nitrate hexahydrate Mg(NO3)(2)center dot 6H(2)O; 85% phosphoric acid H3PO4
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Funding
- Grant OPUS 11 of National Science Centre, Poland [2016/21/B/ST8/01952]
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Coatings with developed surface stereometry, being based on a porous system, may be obtained by plasma electrolytic oxidation, PEO (micro arc oxidation, MAO). In this paper, we present novel porous coatings, which may be used, e.g., in micromachine's biocompatible sensors' housing, obtained in electrolytes containing magnesium nitrate hexahydrate Mg(NO3)(2)center dot 6H(2)O and/or zinc nitrate hexahydrate Zn(NO3)(2)center dot 6H(2)O in concentrated phosphoric acid H3PO4 (85% w/w). Complementary techniques are used for coatings' surface characterization, such as scanning electron microscopy (SEM), for surface imaging as well as for chemical semi-quantitative analysis via energy dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), glow discharge optical emission spectroscopy (GDOES), and X-ray powder diffraction (XRD). The results have shown that increasing contents of salts (here, 250 g/L Mg(NO3)(2)center dot 6H(2)O and 250 g/L Zn(NO3)(2)center dot 6H(2)O) in electrolyte result in increasing of Mg/P and Zn/P ratios, as well as coating thickness. It was also found that by increasing the PEO voltage, the Zn/P and Mg/P ratios increase as well. In addition, the analysis of XPS spectra revealed the existence in 10 nm top of coating magnesium (Mg2+), zinc (Zn2+), titanium (Ti4+), and phosphorus compounds (PO43-, or HPO42-, or H2PO4-, or P2O74-).
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