Journal
BIOSENSORS-BASEL
Volume 2, Issue 2, Pages 114-126Publisher
MDPI AG
DOI: 10.3390/bios2020114
Keywords
silicon nitride; optical gratings; waveguide; biosensor
Funding
- VI National RDi Plan
- Iniciativa Ingenio
- Consolider Program
- CIBER Actions
- Instituto de Salud Carlos III
- European Regional Development Fund
- Commission for Universities and Research of the Department of Innovation
- Universities, and Enterprise of the Generalitat de Catalunya
- Fundacion M. Botin, Santander, Spain
- NANOMEDIAG [EUI2008-00172]
- Spanish Ministry of Science and Innovation (MICINN)
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New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si3N4 as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.
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