Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 30, Issue 5, Pages -Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.4742904
Keywords
atomic force microscopy; elemental semiconductors; gallium arsenide; germanium; III-V semiconductors; molecular beam epitaxial growth; photoluminescence; secondary ion mass spectra; semiconductor epitaxial layers; semiconductor growth; surface roughness; valence bands
Funding
- Intel Corporation
- Institute for Critical Technology and Applied Sciences (ICTAS) at Virginia Tech
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [0846834] Funding Source: National Science Foundation
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High-quality epitaxial Ge layers for GaAs/Ge/GaAs heterostructures were grown in situ in an arsenic-free environment on (100) off-oriented GaAs substrates using two separate molecular beam epitaxy (MBE) chambers, connected via vacuum transfer chamber. The structural, morphological, and band offset properties of these heterostructures are investigated. Reflection high energy electron diffraction studies exhibited (2 x 2) Ge surface reconstruction after the growth at 450 degrees C and also revealed a smooth surface for the growth of GaAs on Ge. High-resolution triple crystal x-ray rocking curve demonstrated high-quality Ge epilayer as well as GaAs/Ge/(001)GaAs heterostructures by observing Pendelloumlsung oscillations and that the Ge epilayer is pseudomorphic. Atomic force microscopy reveals smooth and uniform morphology with surface roughness of similar to 0.45 nm and room temperature photoluminescence spectroscopy exhibited direct bandgap emission at 1583 nm. Dynamic secondary ion mass spectrometry depth profiles of Ga, As, and Ge display a low value of Ga, As, and Ge intermixing at the Ge/GaAs interface and a transition between Ge/GaAs of less than 15 nm. The valence band offset at the upper GaAs/Ge-(2 x 2) and bottom Ge/(001)GaAs-(2 x 4) heterointerface of GaAs/Ge/GaAs double heterostructure is about 0.20 eV and 0.40 eV, respectively. Thus, the high-quality heterointerface and band offset for carrier confinement in MBE grown GaAs/Ge/GaAs heterostructures offer a promising candidate for Ge-based p-channel high-hole mobility quantum well field effect transistors.
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