Journal
VACUUM
Volume 155, Issue -, Pages 408-411Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2018.06.035
Keywords
ZnO tubes; MOCVD; Growth temperature; Reactor pressure; Zn-O ratio
Funding
- National Key Research and Development Program of China [2016YFB0401702]
- Shenzhen Peacock Team Project [KQTD2016030111203005]
- Shenzhen Innovation Project [JCYJ20160301113356947, JCYJ20160301113537474]
- Southern University of Science and Technology
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We have synthesized ZnO tubes, without any catalyst, on Al2O3 (001) substrates by metal organic chemical vapor deposition (MOCVD) at different growth temperatures, pressures and Zn-O ratios. The results confirm that the growth temperature, reactor pressure and Zn-O ratio play important roles in the formation of hexagonal ZnO tubes. Scanning electron microscopy (SEM) images indicated that, at a growth temperature of 500 degrees C, reactor pressure of 75 Torr and Zn-O ratio of 10/75 are an appropriate condition to obtain hexagonal and well-aligned ZnO tubes. High-resolution, double crystal XRD analysis shows a symmetric omega-scan rocking curve, with a full width at half maximum (FWHM) of 1.1 degrees. It confirms the ZnO tubes have highly c-axis orientation on Al2O3 substrate. Subsequently, room temperature photoluminescence (PL) studies confirm that the enhancement of UV emissions from ZnO tubes is due to increasing Zn-O ratios.
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