Journal
ULTRAMICROSCOPY
Volume 189, Issue -, Pages 102-108Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2018.03.015
Keywords
Electron optics; Scanning electron microscopy; Back scattered electrons; Energy filtering
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Funding
- TA CR [TE01020118]
- MEYS CR [LO1212]
- EC [CZ.1.05/2.1.00/01.0017]
- CAS [RVO:68081731]
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We present a new type of an in-lens detector designed for Thermo Fisher Scientific (FEI) electron microscopes with the Elstar column. A key feature of it is high-pass energy filtering to enable the detection of low-loss backscattered electrons with their energy close to the primary beam energy. We show an application of the detector in imaging of a biological sample where the signal from these electrons leads to a significant improvement in resolution. (C) 2018 Elsevier B.V. All rights reserved.
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