Journal
ULTRAMICROSCOPY
Volume 184, Issue -, Pages 177-187Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2017.09.001
Keywords
Scanning transmission electron microscopy (STEM); Annular bright field (ABF); Picometer-scale; Quantitative ABF; Specimen tilt
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Funding
- National Key R&D Program of China [2016YFA0300804, 2016YFA0300903]
- National Natural Science Foundation of China [51672007, 51502007]
- National Program for Thousand Young Talents of China
- Peking-Tsinghua-IOP Collaborative Innovation Centre for Quantum Matter
- Japan Society for the Promotion of Science (JSPS) [17H06094]
- Ministry of Education, Culture, Sports, Science and Technology in Japan (MEXT) [12024046]
- Grants-in-Aid for Scientific Research [17K18974, 17H06094] Funding Source: KAKEN
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We study the effects of specimen mistilt on the picometer-scale measurement of local structure by combing experiment and simulation in annular bright-field scanning transmission electron microscopy (ABF-STEM). A relative distance measurement method is proposed to separate the tilt effects from the scan noise and sample drift induced image distortion. We find that under a typical experimental condition a small specimen tilt (similar to 6 mrad) in 25 nm thick SrTiO3 along [ 001] causes 11.9 pm artificial displacement between O and Sr/TiO columns in ABF image, which is more than 3 times of scan noise and sample drift induced image distortion similar to 3.2 pm, suggesting the tilt effect could be dominant for the quantitative analysis of ABF images. The artifact depends on the crystal mistilt angle, specimen thickness, defocus, convergence angle and uncorrected aberration. Our study provides useful insights into detecting and correcting tilt effects during both experiment operation and data analysis to extract the real structure information and avoid mis-interpretations of atomic structure as well as the properties such as oxygen octahedral distortion/shift. (C) 2017 Elsevier B.V. All rights reserved.
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