Uniformity of Kilo-Pixel Arrays of Transition-Edge Sensors for X-ray Astronomy

We are developing kilo-pixel arrays of transition-edge sensor (TES) microcalorimeters for use in future laboratory and space based X-ray astrophysics experiments. These arrays are required to achieve an energy resolution of Delta E-FWHM < 3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. In this contribution we report on the development of 32 x 32 arrays of Mo/Au TESs with Bi/Au X-ray absorbers. We present measurements from 8 x 8 test arrays and 32 x 32 uniform arrays. Measurements of the bias point resistance and magnetic field dependence of the transition properties show that by carefully tuning the applied magnetic field the requirements on T-C and magnetic field uniformity can be reduced whilst maintaining the target energy resolution. Results show Delta E-FWHM approximate to 2.0 - 2.5 eV FWHM at a photon energy of 6 keV, measured across several pixels. Despite larger than typical T-C variation across the detector, time division multiplexed readout of 30 common electrically biased pixels in the 32 x 32 array (in a 2 column x 16 row configuration) show an average Delta E-FWHM = 3.0 +/- 0.3 eV.