Journal
THIN SOLID FILMS
Volume 660, Issue -, Pages 852-858Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2018.03.003
Keywords
Atomic layer deposition; Zinc oxide; Passivation; Oxygen vacancy; Oxygen-rich environment; Peroxide; Deposition temperature
Categories
Funding
- Ministry of Trade, Industry & Energy (MOTIE, Korea) under the Industrial Strategic Technology Development Program [10068075]
- China Scholarship Council (CSC) [201608440332]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10068075] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Ask authors/readers for more resources
Owing to oxygen vacancies, the as-prepared ZnO normally shows n-type semiconducting characteristic. This has restricted the preparation of high-quality p-type ZnO and the application of ZnO optoelectronic devices. Therefore, we studied a method of using H2O2 as an oxygen source to passivate oxygen vacancies (V-o) in ZnO films via atomic layer deposition (ALD). The temperature range for the self-limited growth of crystalline ZnO thin films by ALD using diethylzinc and H2O2 was found to be in the range of 80 to 150 degrees C. Our results show that the use of H2O2 as an oxygen source can provide an O-rich condition (instead of H2O) for the growth of ZnO film, with a total preferential (002) orientation of the growth plane and decreased grain size. Further, the O-rich growth environment can suppress the formation of V-o and zinc interstitials and decrease the carrier concentration in ZnO (from 2.525 x 10(19) cm(-3) to 1.695 x 10(12) cm(-3)). This can lead to an increase in the film resistivity from 1.717 x 10(-2) Omega.cm for a ZnO film prepared using H2O to 1.348 x 10(4) Omega.cm for a ZnO film prepared using H2O2. Thus, H2O2 could be used to passivate V-o in ZnO at a low temperature, and it could be beneficial for the preparation of p-type ZnO films.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available